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A NOVEL TECHNOLOGY FOR THE PRODUCTION OF STRUCTURED  NANODIMENSIONAL THIN FILMS AND USER DEFINED GEOMETRIES.
PATENT PENDING # 60:232950     09/15/2001

The invention under discussion enables the engineered deposition of high performance ultra thin coatings from a wide variety of materials.  The coatings are structured and user defined in terms of  geometry and chemical composition in all three dimensions.  The depositions produced enable miniaturization, enhancement of optical, electro-magnetic and mechanical properties, user defined geometries and a profusion of surface specific phenomenon.  The technology is capable of producing ultra-thin products with superior performance in a wide variety of engineered geometries currently unavailable in the market.   The improved performance is due to the engineered nature of the deposition.  Coatings of this type also present significant cost savings, as they require reduced amounts of deposited materials in order to achieve the required performance specifications.  This technology is applicable to a wide variety of industries and is currently available for license. 

SAMPLE APPLICATIONS
Contact wear resistance is of significant interest to the electronics industry.  If one desires a wear resistant gold coating,  by the application of this technology, one could deposit a combination of TiN (titanium nitride) and Au (gold) producing a deposition that retains the electrical and optical performance of gold, coupled with the strength and toughness of TiN. 

Alternatively, if a precision polishing surface is required, the above structure can be etched to remove the Au, thereby producing a near perfect TiN polishing surface.  If a carbide polishing surface is preferable, the initial deposition can be produced with the appropriate carbide system.  

Furthermore, if a nano-dimensional template or a nano-dimensional filter is required the TiN and Au can be deposited in a cylindrical form.   Where upon etching the Au results in a TiN structure with cylindrical pores along one axis.   If nano-dimensional wires are desired, they can be produced by capillary action or by simple choice of the deposition materials and appropriate etching.

The technology is capable of producing ultra-thin products with superior performance in a variety of engineered geometries.    The improved performance is due to the engineered nature of the deposition.

SCIENTIFIC PRINCIPAL
The underlying principle of the invention revolves around the mechanisms of stress reduction in thin films.  Thin films, like those found in conventional deposition technologies, are prone to deformation and reduced performance due to the stresses of different crystal lattice parameters.  These lattice differentials are present between the different components in a deposition, the substrate, and the deposition itself.   These stresses are a function of the mobility of adatoms within the deposition and the affinity of a species to agglomerate with itself and other species.  Another way of viewing this is, how willing is a species to combine with other adatoms (both of the same and different species).  It is well known that just a few percent difference in lattice parameters creates huge stresses in a film. These stresses are a natural occurrence and are a function of how mobile a species is, its’ surface activity, and the associated chemical and physical potential energies.   These parameters are well known, and for most species, can be found in the appropriate literature.  Operators in the field of deposition technology do all that is possible to minimize these effects in order to produce depositions with the minimum amount of stress.  The technology presented here utilizes these stresses and by defining the deposition parameters, encourages these stresses to produce depositions with a structured nature.  In the application of this technology we are not fighting the inherent nature of the materials and their behavior.  Rather, this technology encourages the stress evolution and the natural stress relief mechanisms resulting in controlled growth into both the horizontal and vertical planes.

This methodology can be realized by the precise control of the deposition parameters, which enables and defines the physics of stress expulsion.   Thus, consecutive depositions of materials X, Y, and Z etc. at proper conditions produce 3D anisotropic structures defined by the user on a nanometer to micron scale. The structure formed is a function of the deposition parameters of each individual component.

PROOF OF CONCEPT
In one of our test samples, we selected a two-component system comprised of gold (Au) and titanium nitride (TiN).   In general, there are three possible structures for consecutive coatings of two different materials; a multilayer structure, a non-structured deposition and by application of this technology a three dimensional engineered structure. The deposition parameters were established so that a carrot like structure was deposited.   The resulting deposition was analyzed by scanning electron microscopy (SEM) and X-ray diffraction (XRD). In the case of thin films, 200 – 300 nanometers, XRD provides information about the structure of all metals or compounds in the film, in this case Au and TiN.   The initial XRD trace recorded both Au and TiN. If we selectively etched one of the components, for example Au; we will see a XRD spectra for TiN, only if the coating has a carrot-like structure.  If the structure was multilayered or non-structured, etching would remove only the surface Au and a gold XRD trace would also be recorded. In order to demonstrate that the deposition was indeed carrot like, we chemically etched Au from the deposition using a mixture of hydrochloric and nitric acids.  The deposition was then re-analyzed by XRD.   The resulting XRD, figure 5, showed no trace of gold, which proves that the deposition was structured as defined by the process.

Figure 4 represents the deposition build up as a function of material.

Figure 5 represents the XRD diffraction patterns before and after chemical etching

APPLICATIONS
This technology is applicable over a very wide range of novel applications as well as an enhancement and replacement of existing technologies. The ability to utilize this technology on existing equipment, with small modifications, enables its wide range application in a cost-effective manner.   A short list of potential applications includes:

Wear resistant conductive thin films                                                                                    Applications abound in the electronics industry, telecommunications and systems utilizing electrical and mechanical contacts.

Wear resistant decorative plating                                                                                          Coatings for jewelry, silverware and decorative fixtures.   This technology enables high wear resistance, the ability to deposit high levels of cost effective materials and low levels of expensive materials with increased performance while maintaining the appearance of precious metals.

Strength enhanced coatings                                                                                                           This technology can be applied to stamping and cutting applications, automotive, aerospace, medical and structural components.   Cutting tools can be produced with cost effective materials and subsequently deposited with a structured material to increase strength and toughness.  Used tools can be re-coated to original dimensions.   Structured depositions could greatly prolong tool life.    Coatings may prolong and protect CD's, by itself a multi-billion dollar industry.   Other applications include medical tools, precision mechanical tools, drill bits, coatings for machined parts used in abrasive environments, bearings, and optical coatings to name but a few. 

Abrasive thin film media                                                                                                               With the development of miniaturized technology, finely controlled abrasive thin films will enable extremely fine control over polishing depths and defect sizes.  Abrasive thin films of this type may find many new applications.

Wear resistant optical                                                                                                                     The introduction of fiber optics to replace conventional connection and transmission lines may require novel structures to enable contacts, switches and protective coatings.   Ultra thing coatings may also enable user-defined applications such as corrosion resistance using silver nitride and integration possibilities.   User defined coatings may also enable the coating of engineered systems to replace breakable glass and to facilitate optical to electrical junctions.

Quantum Dot arrays                                                                                                                       This is a high technology application related to the new development in the nano-structured materials.   This is a relative new field with applications in R & D, medicine, drug delivery and novel optical applications.   Some examples include nano-dimensional reversible media, field emission nano-tip arrays based on metal dots, diamond like materials and thermo-stable quantum dot arrays.

Optical coating with 3D anisotropy                                                                                               With the expansion of the space program and ballistic missile technologies, reflective coatings for harsh environments have become a concern. Optical reversible media for harsh environments, polarized reflective films, interference filters, and cylindrical magnetic optical domains are possible with this deposition technology.

Nanodimensional templates                                                                                                        Nanodimensional-template structures or filters produced from nitrides, oxides, carbides, silicides or other materials are direct applications of this technology.  Applications such as nano-dimensional sieves for genetic materials, user defined porous structures for refining, catalytic and fuel cell membranes are a small sample of potential applications.

Precision mechanical devices and MEMS/NEMS                                                              Immediate applications include precision coatings with exact dimensions for MEMS, NEMS, IR and UV-VIS mirrors, and engineered coatings designed for multitasking applications.  

 Table 1.            Short list of possible products based on this technology.  

Technology for the production of 3D anisotropic structures

I

II

III

IV

V

VI

Wear resistant decorative coatings

Wear resistant conductive thin film coatings

Strength enhanced coatings

Quantum dots arrays

Optical coatings with 3D anisotropy

Nano-templates

Gold like coatings with imitation of any gold alloy

Silver like coatings

Platinum like coatings

Palladium like coatings

Imitation of other pressures metal coatings

 

Conductive pins

Conductive pads

Interconnections

Inter- and/or connectors with anisotropic conductivity

 

Cutting tools

Abrasive thin film media

Wear resistant CD disks and others

Wear resistant optical coatings

 

 

Nano-dimensional reverse media

Field emission nano-tip arrays based on:

A – metal dots

B – carbon nanotubes and diamond like materials

C – diamond

D – semiconductors

Thermostable quantum dot arrays

 

 

Reflective coating for harsh environment

Optical reversible media for harsh environment

Polarized reflective films

Interference filters

 

 

 

Nanodimensional filters

Nano-templates from nitrides

Nano-templates from oxide

Nano-templates from carbides

Nano-templates from silicides

Nano-templates from other materials

Nano-electrodes

3D nano-sculptured multi-components films

This technology is applicable through a wide range of applications and can be readily commissioned to mass production.  We perceive a production system to look very much like a standard deposition production facility.   Our interest is in licensing the technology and in providing technical assistance.   We are very excited about this technology and truly believe it to possess significant market potential.   If you are interested in this technology or have questions of any kind, please contact Dr. Yuval Avniel at MicroPowder Solutions, LLC.  

MicroPowder Solutions, LLC., 204 5'th avenue, Longmont, CO 80501 (303) 485-0229




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